Energy efficient transport
Flexible belt systems
Thanks to its time-tested conveyor system, the RDS drying oven assures reliable transport of wafers though the system. The flexibility offered by the conveyor system is reflected in the ability to choose from a single, double or triple lane. The top quality conveyor belt assures low-vibration transport without additionally stressing the cells, resulting in a lower breakage rate. Belts with welded, arched or entwined edges are available for the different heating zone conveyor variants.
In addition to this, the conveyor unit is separated between the heating and cooling zones. Separate conveyance reduces carry-over of heat into the cooling zone, thus achieving a steeper cooling gradient. A further advantage of isolated conveyor belt units is reduced energy consumption, because only the mass of the substrate, and not the entire conveyor system, has to be cooled down.