The cooling zone: efficient - powerfull - easy maintenance
The cooling of the Rehm Fast Firing Oven operates on the basis of the forced convection principle. Thereby air is exhausted from the process chamber by high-performance blowers. Subsequently the cold air is steamed inside the chamber again and onto the wafers.
Cooling power can be regulated by the intensity of the blowers, or even over an integrated water cooling system. Therefore the optimal cooling gradient for the appropriated requirements can be adjusted.
The top of the cooling tract can be manually opened, like the process chamber, providing a good accessibility. The filter units are integrated in the system by a drawer appliance and can be easily changed in this vein.