RFS Process Chamber
The process chamber consists of a multilayer ceramic insulation structure. Each zone can be controlled separately thanks to the ventilation concept integrated into the chamber. Cool process gas is fed over the outside wall, along the hot process chamber, and into its interior via the IR radiators. The gas is subsequently exhausted from the chamber in accordance with the Venturi principle. As a result, the outside wall of the cooling chamber remains at room temperature and energy loss is minimal. Beyond this, homogenous heat distribution is achieved without additional heating costs by laminar flow.
Reducing maintenance costs is another important factor in the field of equipment manufacturing. A lifting motor has been integrated to this end which automatically opens the top section of the process chamber.
Furthermore, importance has also been placed upon the fact that the IR radiators can be replaced quickly in an uncomplicated fashion. Installation of the radiators through the use of insertion openings and embedding them into a ceramic sealing material reduces heat loss and eliminates the need for tools.
Hoisting motor for chamber opening