Optimal process performance for best cell results

gas flow inside of the process chamber

The RFS and RFS-D Fast Firing Systems Rehm Thermal Systems offer a variety of advanced process features and thermal settings which opens the photovoltaic manufacturers a new level of efficiency and productivity.

The process chamber consists of a multilayer ceramic insulation structure. Each zone can be controlled separately thanks to the ventilation concept integrated into the chamber. Cool process gas is fed over the outside wall, along the hot process chamber, and into its interior via the IR radiators. The gas is subsequently exhausted from the chamber in accordance with the Venturi principle. As a result, the outside wall of the cooling chamber remains at room temperature and energy loss is minimal. Beyond this, homogenous heat distribution is achieved without additional heating costs by laminar flow.

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